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Surface micromachining
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#	Item
1	Monolithic fabrication of millimeter-scale machines Add to Reading List Source URL: micro.seas.harvard.edu Language: English - Date: 2012-05-23 11:36:44 Technology Transducers Semiconductor device fabrication RF MEMS Microelectromechanical systems Microfabrication Surface micromachining Micromachinery Sensor Microtechnology Materials science Nanotechnology
2	VTT MEMSFAB LTD Contract manufacturing of micro- and nanoelectronic devices VTT Memsfab Ltd carries out commercial production of microelectromechanical systems (MEMS) and other micro- and nanoelectronic devices. The com Add to Reading List Source URL: www.vttmemsfab.fi Language: English - Date: 2015-01-07 07:29:02 Semiconductor device fabrication Microelectromechanical systems Etching Wafer Silicon on insulator Micro-Opto-Electro-Mechanical Systems Surface micromachining EV Group Microtechnology Materials science Technology
3	Surface Micromachining An IC-Compatible Sensor Technology Bernhard E. Boser Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley Add to Reading List Source URL: www.hotchips.org Language: English - Date: 2013-07-27 22:47:54 Transducers Engineering Sensors Electrical engineering Mechanical engineering Microelectromechanical systems Accelerometer Micromachinery Gyroscope Microtechnology Technology Materials science
4	Sensors 2007, 7, [removed]sensors ISSN[removed] © 2007 by MDPI www.mdpi.org/sensors Add to Reading List Source URL: www.mdpi.org Language: English - Date: 2007-05-24 07:46:10 Electromagnetism Microelectromechanical systems Accelerometer Surface micromachining Piezoresistive effect Industrial etching Abrasive Deep reactive-ion etching Abrasive blasting Microtechnology Materials science Technology
5	POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie, Lars Erdmann, Xu Zhu, Kaigham J. Gabriel† and Gary K. Fedder† Department of Electrical and Computer Engineering and † Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2005-06-13 11:06:39 Semiconductor device fabrication Nanotechnology Etching Microelectromechanical systems Transducers Surface micromachining Deep reactive-ion etching Comb drive Advanced Silicon Etch Microtechnology Materials science Technology
6	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2005-06-13 10:40:36 Microelectromechanical systems Surface micromachining Etching Comb drive Microfabrication Deep reactive-ion etching Advanced Silicon Etch CMOS Micromachinery Microtechnology Materials science Technology
7	Capabilities Service Details Specific application Add to Reading List Source URL: www.ipms.fraunhofer.de Language: English - Date: 2015-01-15 19:37:11 Semiconductor device fabrication Nanotechnology Etching Microelectromechanical systems Transducers Surface micromachining Bulk micromachining Deep reactive-ion etching Chemical-mechanical planarization Materials science Microtechnology Technology
8	MEMS & Micro Power Generation (MPG) DARPA Tech 2000 William C. Tang, Ph. D. Program Manager[removed] Add to Reading List Source URL: archive.darpa.mil Language: English - Date: 2000-10-06 09:20:49 RF MEMS Microelectromechanical systems Microsystem Wafer bonding Surface micromachining DARPA Microtechnology Materials science Technology
9	CIF2SVG Converter: A Web Publishing Tool for Micromachining and Integrated Circuit Technology Hanjin Cho ([removed]) & Ash M. Parameswaran ([removed]) Institute of Micromachine and Microfabrication Research Schoo Add to Reading List Source URL: www.svgopen.org Language: English - Date: 2003-11-07 14:59:31 Technology Micromachinery Microelectromechanical systems Microfabrication Integrated circuit Scalable Vector Graphics Surface micromachining Microtechnology Materials science Nanotechnology
10	VTT MEMSFAB LTD Contract manufacturing of micro- and nanoelectronic devices VTT Memsfab Ltd carries out commercial production of microelectromechanical systems (MEMS) and other micro- and nanoelectronic devices. The com Add to Reading List Source URL: www.vttmemsfab.fi Language: English - Date: 2012-06-07 03:44:53 Semiconductor device fabrication Microelectromechanical systems Etching Wafer Silicon on insulator Micro-Opto-Electro-Mechanical Systems Surface micromachining EV Group Microtechnology Materials science Technology

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